Shakoor, A. et al. Express 21, 3035030357 (2013). Zhou, B., Li, E., Bo, Y. Mercante, A. J. et al. Lithium Niobate Electro-Optic Modulators. Opt. Electro-optic modulator (EOM) takes a vital role in connecting the electric and optical fields. 42.25.p. Photon. supervised the project. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. Guarino, A., Poberaj, G., Rezzonico, D., GeglInnocenti, R. & Gnter, P. Electro-optically tunable microring resonators in lithium niobate. Lithium niobate optical modulators: Devices and applications The device also exhibits a second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\) (Fig. View Spotlight analysis of the #OPG_JOSA_B paper Spiral waveguide Bragg grating modulator on thin-film Z-cut lithium niobate http://ow.ly/NsJS50NVr0m Spotlight . Google Scholar. Extended Data Fig. Anyone you share the following link with will be able to read this content: Sorry, a shareable link is not currently available for this article. 6a, with a broadened spectral linewidth dependent on the driving power. 1d and8a). IEEE J. Sel. MathSciNet 24, 3400114 (2018). https://doi.org/10.1038/s41586-018-0551-y, DOI: https://doi.org/10.1038/s41586-018-0551-y. 14 April 2023, Light: Science & Applications PubMed ADS Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . Difficulty in etching lithium niobate (LN) results in a relatively high propagation loss, which necessitates sophisticated processes to fabricate high-quality factor (Q) microresonators. Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY, 14627, USA, Mingxiao Li,Jingwei Ling,Yang He&Qiang Lin, Institute of Optics, University of Rochester, Rochester, NY, 14627, USA, You can also search for this author in Wood, M. G. et al. Slider with three articles shown per slide. Express 27, 1985219863 (2019). Nevertheless, there still exists a balance between the driving voltage and modulation bandwidth. Lithium Niobate Nonlinear Thermal Waveguide MODE Automation API Nonlinear Optics Photonic Integrated Circuits - Active Computing Second-harmonic generation (SHG) in a Lithium Niobite - LiNbO3 (LNO) nanophotonic waveguide is studied using temperature modulation to achieve efficient phase matching. Integrating high-performance plug-and-play lasers would significantly reduce the cost, complexity, and power consumption of future communication systems, said Amirhassan Shams-Ansari, a graduate student at SEAS and first author of the study. Chirp in Mach-Zehnder Lithium Niobate Modulators - Optiwave J. Lightwave Technol. This value primarily reaches the photon-lifetime limit of the EOM cavity (~11ps), as the electrode circuit has much broader spectral response as indicated by the flat S11 reflection spectrum shown in the inset of Fig. J. Lightwave Technol. Photonics 13, 454459 (2019). A review of lithium niobate modulators for fiber-optic communications systems. As a result, a full air cladding would strongly limits the electro-optic coupling, leading to a low efficiency of electro-optic tuning as indicated by the individual black column in Fig. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Ayata, M. et al. Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. Rev. Compact MZI modulators on thin film Z-cut lithium niobate Opt. Jian, J. et al. Wooten, E. L. et al. Express 24, 1559015595 (2016). Nature 435, 325327 (2005). High-performance and linear thin-film lithium niobate MachZehnder modulators on silicon up to 50GHz. Recently, heterogeneously integrated silicon and lithium niobate (Si/LN) optical modulators have demonstrated attractive overall performance in terms of optical loss, drive voltage, and modulation bandwidth. Electron-plasmon interaction on lithium niobate with gold nanolayer and its field distribution dependent modulation. Electron. Thin-film lithium niobate electro-optic modulators: To etch or not to b, High-speed data modulation set-up. Miller, D. A. Correspondence to are involved in developing lithium niobate technologies at HyperLight Corporation. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. 1e) to achieve a critical coupling. B 97, 104105 (2018). The inset shows an optical microscopic image of an EOM with the RF probe in contact. 5, 425429 (2011). Nature Communications (Nat Commun) You are using a browser version with limited support for CSS. Microstructure and domain engineering of lithium niobate crystal films 6, 488503 (2012). This is a preview of subscription content, access via your institution. Low-loss plasmon-assisted electro-optic modulator. Lithium niobate etching is not required for making the hybrid optical waveguides. For LN, however, the EOMs developed so far1,13,14,15,16,17,18,19,20,21,22,23,24,25,26 generally exhibit significant dimensions, leading to significant power required to drive the EOMs. High-quality lithium niobate photonic crystal nanocavities. Nature Nat. Recently, thin-film monolithic LN11,12 emerges as a promising platform, where low-loss and high-quality photonic integration together with the strong Pockels effect enables superior modulation performance13,14,15,16,17,18,19,20,21,22,23,24,25,26, showing great potential as an excellent medium for photonic integrated circuits and future photonic interconnect. Lithium niobate photonic crystal wire cavity: realization of a compact electro-optically tunable filter. Optica 5, 233236 (2018). 94, 241107 (2009). Google Scholar. Peer review information Nature Communications thanks Huihui Lu, and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. Opt. This phenomenon is shown more clearly in Fig. Dong, P. et al. Numerical simulations show that the device exhibits a small capacitance C of C=~22fF, which is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. External modulator is typically either a LiNbO3 modulator or an electroabsorptive modulator. However, the dielectric constant of LN is ~28 at a microwave frequency, much larger than that of air. Rao, A. et al. Ultra-high-linearity integrated lithium niobate electro-optic modulators PubMed Central Nature thanks M. Hochberg and the other anonymous reviewer(s) for their contribution to the peer review of this work. Use the Previous and Next buttons to navigate the slides or the slide controller buttons at the end to navigate through each slide. carried out the device characterization. Laser Photonics Rev. We propose and demonstrate a Mach-Zehnder modulator in Z-cut lithium niobate thin film (LNTF) with a vertical electric field structure. 314, 317 (2014). 1f). The left inset shows the orientation of the LN crystal where the optical axis is along the z direction. Streshinsky, M. et al. Article Review and perspective on ultrafast wavelength-size electro-optic modulators. Enhanced electro-optic lithium niobate photonic crystal wire waveguide on a smart-cut thin film. This work is supported in part by National Science Foundation (NSF) (EFMA-1641099, ECCS-1810169, and ECCS-1842691); the Defense Threat Reduction Agency-Joint Science and Technology Office for Chemical and Biological Defense (grant No. 8b, c. The data that support the findings of this study are available from the corresponding author upon reasonable request. The velocity-matched modulator has a typical insertion loss of 4 dB, drive voltage of 5 V, and electrical return loss of . 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. Rao, A. et al. By submitting a comment you agree to abide by our Terms and Community Guidelines. Thank you for visiting nature.com. 4, e255 (2015). The inset of a shows the measured normalized transmission (NT) on a logarithmic scale, revealing an extinction ratio of 30 dB. Laser. Photonics 13, 8090 (2019). High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation. Lu, H. et al. Rao, A. Nature 528, 534538 (2015). Integrated lithium niobate electro-optic modulators: when performance 1e) to enable a partial reflection/transmission, with the hole number optimized for a critical coupling to the cavity. To date, it remains an open challenge in realizing a high-speed and energy-efficient modulator at the wavelength scale on the monolithic LN platform. Herein, we review the progress in microstructure and domain. Thank you for visiting nature.com. & Fan, S. Complete optical isolation created by indirect interband photonic transitions. Figure7a shows the electro-optic modulation response of the device (blue curve), which exhibits a 3-dB modulation bandwidth up to around 17.5GHz. Xu, Q., Schmidt, B., Pradhan, S. & Lipson, M. Micrometre-scale silicon electro-optic modulator. For EOM, we adopt one-dimensional photonic-crystal nanobeam as the basic underlying structure (Fig. Optica 6, 845853 (2019). 28, 736739 (2016). The 50-m width of the electrode (Fig. High-quality lithium niobate photonic crystal nanocavities. To show the electro-optic tuning property, we applied a DC voltage to the chip and monitored the cavity transmission spectrum of the \({\mathrm{{TE}}}_{01}^{0}\) mode. Here, we report an EO lithium niobate metasurface mediated by topological corner states. Integrated microwave photonics. The devices exhibit a significant tuning efficiency up to 1.98 GHz V1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m3. PSI offers ultra-high-speed lithium niobate phase modulators. 16, 18 (2018). In summary, we have demonstrated high-speed LN EOMs with a broad modulation bandwidth of 17.5GHz, a significant tuning efficiency up to 1.98GHzV1, and an electro-optic modal volume as small as 0.58m3. This is in strong contrast to piezoelectric acoustic modulation which is confined to the vicinity of mechanical resonance frequency45,49,50. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. As shown in Fig. Nozaki, K. et al. 1d). Our thin-film modulator (a) has an oxide layer underneath the device layer, so that velocity matching can be achieved while maximum electro-optic efficiency is maintained. You are using a browser version with limited support for CSS. CAS Photonics 11, 5357 (2017). Figure2 shows a fabricated device (see Methods for the details of device fabrication). Harnessing plasma absorption in silicon MOS ring modulators, Resonant plasmonic micro-racetrack modulators with high bandwidth and high temperature tolerance, Photonic van der Waals integration from 2D materials to 3D nanomembranes, A power-efficient integrated lithium niobate electro-optic comb generator. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Nat. Therefore, the electrodes can be shrunk to 103m2, which would reduce the capacitance considerably to ~0.27fF (~1.0fF if including the integrated wires36), according to our FEM simulations. However, negligible degradation observed between Fig. 1e) is still able to produce a well-confined point-defect cavity, with a simulated optical Q of ~105 for the fundamental transverse-electric-like (TE-like) cavity mode, \({\mathrm{{TE}}}_{01}^{0}\), shown in Fig. Nat. Wolf, S. et al. Single-chip microprocessor that communicates directly using light. Acousto-optical modulation of thin film lithium niobate waveguide devices. Liu, K., Ye, C. R., Khan, S. & Sorger, V. J. 1c), optimization of the photonic potential via an appropriate pattern of lattice constant (Fig. C.W., M.Z. CAS PDF Using the Lithium Niobate Modulator: Electro-Optical and - OEQuest Nature (Nature) Chen, L., Wood, M. G. & Reano, R. M. 12.5 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes. Loncar and his team used small but powerful distributed feedback lasers for their integrated chip. Wang, C., Zhang, M., Stern, B., Lipson, M. & Lonar, M. Nanophotonic lithium niobate electro-optic modulators. Preprint at https://arxiv.org/abs/1803.10365 (2018). Photon. Phys. Google Scholar. We expect that these optimization would significantly improve the energy efficiency of the LN photonic-crystal EOM, further decreasing the switching energy down to sub-femtoJoule level.